Cantilever-Based CMOS Nano-Electro-Mechanical Systems
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Book Description
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
Book Info
Introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry.
Cantilever-Based CMOS Nano-Electro-Mechanical Systems,D. Lange,O. Brand,H. Baltes,Springer,3540431438,Atomic force microscopy,Design and construction,Electronics - Semiconductors,Levers,Metal Oxide Semiconductors (Mos),Metal oxide semiconductors, Co,Metal oxide semiconductors, Complementary,Microelectromechanical systems,Microscopes & Microscopy,Microscopy,Nanostructures,Physics,Science/Mathematics,Technical & Manufacturing Trades,Technology,Technology & Industrial Arts,Applied physics & special topics,CMOS compatible micromachining,Cantilever,Chemical sensors,Nanotechnology,Sensors,Technology / Nanotechnology
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