Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)
Editorial Reviews
Book Description
GENERAL DESCRIPTION OF THE SERIES
Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.
In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.
GENERAL DESCRIPTION OF THE VOLUME
This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.
Book Info
Presents a modern overview of microelectronics covering a wide range of topics and providing a blend of theoretical & practical knowledge, with an in-depth treatment of PVD.
Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films),Ronald A. Powell,Academic Press,012533026X,Chemistry - Physical & Theoretical,Electronics - Semiconductors,Engineering - Electrical & Electronic,Life Sciences - Biology - General,Physics,Science,Science/Mathematics,Technology & Industrial Arts,Thin Films Physics,Science / Chemistry / Physical & Theoretical
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